C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control This Guide focuses on the

This Guide focuses on the geometrical parameters of the openings (i

and the amount of deformation induced to the wafer stack by the bonding process

When the liquid phase is exhausted

colorless gas

C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control This Guide focuses on theThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1990. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials. Referenced SEMI Standards None.